| 摘要 |
PURPOSE: A laser beam positioning system is provided to minimize deviation of temperature by cooling or heating the closing unit of heat pipe type for closing the motor housing, and to control the position of the mirror accurately by preventing expansion or contraction of the rotating shaft of the motor. CONSTITUTION: A laser beam positioning system is composed of X and Y driving units changing the irradiation position of the laser beam, closing units sealing the X and Y driving units, heat transfer units transmitting heat to the closing units, and a body in which the X and Y driving units and the closing units are arranged. The X and Y driving units are composed of X and Y mirrors, and X and Y motors adjusting the angle of the X or Y motor. The X and Y motors comprise housings(15a,15b) embedding stators and rotors, and rotating shafts in which mirrors are installed. The closing units comprise containers(300a,300b) surrounding with clearance to the housings and supporting members(35a,35b) supported in the body. |
