| 摘要 |
PROBLEM TO BE SOLVED: To simply perform a circuit simulation by using a general circuit simulation device. SOLUTION: A parameter extraction device 100 extracts an in-line parameter for monitoring in-line data from a wafer 20 in a manufacturing line. A statistic processor 101 generates parameter sets by statistically analyzing the data of the generated parameters and a net list extraction device 102 generates net lists corresponding to the parameter sets by using the layout data of an electronic circuit in the wafer 20 and the parameter sets outputted from the statistic processor 101 only by the number of parameter sets and generates a circuit simulation input file where the parameter sets are described in the net lists. Consequently the input file provided with the parameter sets and the net lists in which manufacturing distortion is reflected not only to elements constituting the electronic circuit in the wafer 20 but also to parasitic elements can be automatically generated and dealt by an existing device 103. COPYRIGHT: (C)2005,JPO&NCIPI
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