Process for producing alternate striped electrode array in which transparent electrodes alternate with opaque electrodes, based on single mask designed for the opaque electrodes in self-aligned manner

摘要

In a process for producing an alternate striped electrode array in which transparent electrodes alternate with opaque electrodes: the opaque electrodes are formed on a transparent base; a continuous, transparent conductive film is formed on the opaque electrodes and the transparent base; a continuous, negative resist film is formed on the transparent conductive film; a resist pattern corresponding to the opaque electrodes is formed by using the opaque electrodes as a mask and applying a predetermined type of electromagnetic radiation from the back surface of the transparent base to the negative resist film; and the transparent conductive film is etched by using the resist pattern as a mask so that a portion of the transparent conductive film which remains after the etching is separated from the opaque electrodes and forms the transparent electrodes.