| 摘要 |
A solid state angular rate sensor is fabricated by preparation of a disc-shaped base structure (10) having first and second outer layers of a piezo-electric ceramic material, built up from a number of layers of a ceramic sheet or film that is capable of being tape-cast. The layers are then sintered and an inner layer of metallic material is provided between the outer layers, to complete a piezo-electric base structure having an inner electrode (15) between the sintered outer layers. Arrays of electrode structures are provided on the outer layers of the base structure (10), the electrodes radiating from the central region 14 of the base structure (10) and being equi-spaced around the outer edge of the disc (19).
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