SEMICONDUCTOR SUBSTRATE TRANSFERRING APPARATUS WITH IMPROVED FIXING MECHANISM AND SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS WITH THE SAME

摘要

PURPOSE: A semiconductor substrate transferring apparatus and a semiconductor substrate processing apparatus with the same are provided to reduce a necessary period for the transfer of a semiconductor substrate and to omit a flat zone aligner by fixing and aligning simultaneously the substrate using an improved fixing mechanism. CONSTITUTION: A semiconductor substrate transferring apparatus includes a transfer arm(110) with a groove(111) for holding a semiconductor substrate, a fixing part, and a driving part. The fixing part(120) is installed on the transfer arm to fix stably the substrate to the groove. The driving part(130) is connected with an end of the transfer arm to provide driving force for transferring the substrate. The fixing part includes a pusher(121) for pushing the substrate and actuator connected with the pusher.