| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein the tip of a probe is difficult to be brought into contact correctly with the center of an electrode, because of dispersion in an advancing angle when piercing the probe into a mask and in the conical angle of a tip part, and the problem wherein the tip position of the probe is fluctuated because of a large length of the probe to shift a contact position of the probe tip part with respect to the electrode from its center, in the conventional probe card. SOLUTION: The probe card of the present invention comprises a positioning member with a groove formed in a position corresponding to the electrode to be brought into contact, a probe inserted and fixed to the groove, a ring for holding the positioning member, and a wire for connecting electrically the probe to a wiring on the ring. The ring is pressed onto the electrode to be brought into contact, at prescribed pressure. The probe is a rodlike body having a head part. A tip edge part of the probe is formed to have roundness. COPYRIGHT: (C)2005,JPO&NCIPI
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