| 摘要 |
PROBLEM TO BE SOLVED: To monitor the operating state of a turbo molecular pump without requiring complicated operation. SOLUTION: A communication port 3a, a display part 32, and an input part 33 are installed at the front panel of a power source device 3 driving the turbo molecular pump. The communication port 3a is a receptacle in conformity with the RS-232C standard, and can easily attach and detach an individual monitoring device through a communication cable 6 terminated by a plug in conformity with the RS-232C standard. By connecting the individual monitoring device to the communication port at the front panel, the operating state of one turbo molecular pump can be immediately monitored. Namely, such troublesome operations that the power source device is removed from a rack and the cable connected to the communication port at the rear of the power source device is disconnected and connected to the individual monitoring device can be omitted. COPYRIGHT: (C)2005,JPO&NCIPI
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