| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a flat panel display device which can perform vacuum piping at higher speed, capable of reducing quantity of residual impure gas at the time of tip off. SOLUTION: Exhaust tubes 60c, 60d are fixed to transparent hole parts 50c, 50d formed on a back panel 20 of the flat panel display device 110 display in order to turn the space between a front panel 10 and the back panel 20 into high vacuum, and the exhaust tubes 60c, 60d are located in proximity to each other. When tipping off the exhaust tubes after evacuating down to a target pressure by using the exhaust tubes 60c, 60d, first, the exhaust tube 60c with a large diameter is tipped off while the evacuation through the exhaust tube 60d with a small diameter is made in continuation, and the exhaust tube 60d with the small diameter is tipped off thereafter. COPYRIGHT: (C)2005,JPO&NCIPI
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