| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide element which is strong in light confinement and is excellent also in productivity, and to provide a method of manufacturing such an optical waveguide element with sufficient productivity. <P>SOLUTION: This optical waveguide element is characterized in that a ridge structure 14 extended like a channel is formed on a LiNbO<SB>3</SB>substrate 11, forming an optical waveguide part consisting of ion diffusion layers 12 which are extended at both side ends of the ridge in the ridge structure 14 and whose refractive index is higher than that of the material of the substrate. To manufacture the optical waveguide element, for example, a method of forming two grooves 13 extending in one direction by machining, etc. after forming a proton diffusion layer 12 on the LiNbO<SB>3</SB>substrate 11, so as to allow a part between the grooves 13 to have the ridge structure 14, is used. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
