| 摘要 |
Pattern damage caused by defects and the like of a magnetic layer provided on a substrate of a master carrier for magnetic transfer is prevented and durability of the master carrier is improved. The master carrier for magnetic transfer includes a lamination structure, on a substrate, in which not less than one of two-layer structures laminated in a lamination direction, each of the two-layer structures including a magnetic layer and a hard layer having higher hardness than the magnetic layer, which are laminated on each other in an order of the hard layer and the magnetic layer from the substrate side. The master carrier further includes a hard layer which has higher hardness than the magnetic layer on a top surface of the lamination structure.
|
