| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linearly moving stage easily disposed in a restricted space by forming in a structure wherein a motor mounting bracket and a motor are not largely projected from the surface of a table. <P>SOLUTION: This linearly moving stage comprises a base 10, a motor 1 installed on the base 10 through a motor mounting bracket 4, a ball screw 3 installed on the base 10 through a bearing 51, and a table unit 6 having the table 61 and screwed to the ball screw 3. The motor mounting bracket 4 is fittedly arranged in the base 10 and a preload is applied to the outer ring of the bearing 51 by the motor mounting bracket. The ball screw 3 is connected to the motor 1 through a coupling 2, and the preload is given to the inner ring of the bearing 51 by the coupling 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
