LOW DIELECTRIC CONSTANT MATERIAL, LOW DIELECTRIC CONSTANT FILM, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a low dielectric constant material including zeolite which has an extremely low dielectric constant and shows little rise in dielectric constant over time. SOLUTION: The zeolite used has (1) a framework density of 17.0 T/1000Å3or less and (2) a Si/M ratio (wherein M represents an atom which is a constituent of the framework of the zeolite and is selected from groups III through XIV in the periodic table excluding Si and C (carbon)) of 5 or more. COPYRIGHT: (C)2005,JPO&NCIPI