| 摘要 |
The invention relates to a light source comprising an electrodeless gas discharge chamber which is enclosed in a radiation-permeable capsule, electrodes which are arranged on the outside of the capsule, and an alternating voltage source which is directly connected to the electrodes, on the output side, without any external ballast impedance. The aim of the invention is to enable energy to be effectively injected into the gas discharge chamber using simple means. To this end, the alternating voltage source (5) has a low output impedance compared to the impedance of the plasma produced in the gas discharge chamber (2), a frequency of the alternating voltage which is less than 1 MHz, and means (8) for limiting the output current. |
