| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection device capable of performing excellent appearance inspection by improving the inspection accuracy further, even if an unmeasurable part exists on an object to be imaged. SOLUTION: Cream solder C attached to a pad disposed on a printed circuit board K is imaged by a CCD (charge coupled device) camera 6. Three-dimensional measurement of the cream solder C is performed based on the image, and the appearance inspection is performed. In this case, an unmeasurable spot C2 in the whole shape of the cream solder C is detected. Then, correction is performed, for filling up the unmeasurable spot C2 with a shape C4 formed by integrating a plurality of geometric shapes. The volume of the cream solder C after correction is measured, and the quality on the cream solder C is inspected. COPYRIGHT: (C)2005,JPO&NCIPI
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