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发明名称
摘要
申请公布号
JP3589064(B2)
申请公布日期
2004.11.17
申请号
JP19990018105
申请日期
1999.01.27
申请人
发明人
分类号
H01L41/18;C30B15/00;C30B29/22;C30B29/30;(IPC1-7):C30B29/22
主分类号
H01L41/18
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