DAMAGE DETERMINATION OF V-SHAPED GROOVE GUIDE ON ROLLER V-SHAPED

摘要

A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers is disclosed. Based on the disclosed technical means, the efficacy may be achieved that a damage situation may be automatically examined and notified to maintain a yield in the slicing process in an online high speed environment.

主权项

1. A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers, comprising steps of:
(a) defining a normalized damage equation involving a plurality of parameters for a damage ratio of each of the plurality of V-shaped grooves, and setting a minimum acceptable damage ratio; (b) acquiring a picture of each of the plurality of V-shaped grooves in a depth direction thereof; (c) determining each of the plurality of parameters from the picture of each of the plurality of V-shaped grooves; (d) calculating the damage ratio of each of the plurality of V-shaped grooves from the normalized damage ratio, respectively; (e) comparing the damage ratio of each of the plurality of V-shaped grooves and the minimum acceptable damage ratio to determine if the V shaped groove is failed, respectively; (f) calculating an arithmetic damage relationship for the plurality of V-shaped grooves; and (g) comparing the arithmetic damage relationship and the minimum acceptable damage ratio to determine if the wire guide roller is failed.