发明名称 Quaternary-ternary semiconductor devices
摘要 A semiconductor structure is provided having a III-V substrate, a buffer layer over the substrate, such buffer layer having a compositional graded quaternary lower portion and a compositional graded ternary upper portion. In one embodiment, the lower portion of the buffer layer is compositional graded AlGaInAs and the upper portion is compositional graded AlInAs.
申请公布号 US6818928(B2) 申请公布日期 2004.11.16
申请号 US20020310207 申请日期 2002.12.05
申请人 RAYTHEON COMPANY 发明人 HOKE WILLIAM E.;LYMAN PETER S.
分类号 H01L21/20;(IPC1-7):H01L31/032;H01L31/033;H01L31/072;H01L31/109;H01L35/26 主分类号 H01L21/20
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