| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide high-purity porous alumina with which smoothness good for tools for adsorption, film making tools, filers, etc., can be obtained and which prevents the accumulation of dust on its surface and has the strength sufficient to withstand use. <P>SOLUTION: The high-purity porous alumina sintered compact is manufactured by mixing 50 to 95 vol.% alumina powder of purity ≥99% and average particle size 2 to 5 μm and 5 to 50 vol.% alumina powder of purity ≥99% and average particle size ≤1 μm as starting raw materials and press forming the mixture, thence firing the molding at <1,700°C. The porous alumina is usable for various applications including vacuum chucks, filters, film making tools, etc. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
