| 发明名称 |
SUBSTRATE-LEVITATING DEVICE |
| 摘要 |
<p>A contact member (13) provided on the top of a support member (10) is lifted by a lifting mechanism (6) with a substrate (2) levitated. This causes the contact member (13) to be in contact with the back face of the substrate (2), limiting the movement of the substrate (2) being levitated.</p> |
| 申请公布号 |
WO2004096679(A1) |
申请公布日期 |
2004.11.11 |
| 申请号 |
WO2004JP06000 |
申请日期 |
2004.04.26 |
| 申请人 |
OLYMPUS CORPORATION;OKAHIRA, HIROYUKI |
发明人 |
OKAHIRA, HIROYUKI |
| 分类号 |
B65G49/06;B65G49/07;H01L21/683;H01L21/687;(IPC1-7):B65G49/06;H01L21/68 |
主分类号 |
B65G49/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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