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发明名称
UV-VERSTÄRKTES SILYLIERUNGSVERFAHREN ZUR ERHÖHUNG DES ÄTZWIDERSTANDS VON DÜNNEN RESISTSCHICHTEN
摘要
申请公布号
DE60106229(D1)
申请公布日期
2004.11.11
申请号
DE20016006229
申请日期
2001.04.19
申请人
ADVANCED MICRO DEVICES, INC.
发明人
RANGARAJAN, BHARATH;SUBRAMANIAN, RAMKUMAR;PHAN, A.;SINGH, BHANWAR;TEMPLETON, K.;YEDUR, K.;CHOO, K.
分类号
G03F7/26;H01L21/027;H01L21/311;H01L21/3213;(IPC1-7):G03F7/40
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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