| 摘要 |
The movable point source aperture used in conventional autocollimators for measuring tilt in a microscope's test sample is replaced by a fixed laser diode. The diode is turned on only for the duration of the tilt measurement, when light is delivered to the optical system of the microscope without obstruction of the normal illumination path. Similarly, the two switchable optical systems conventionally used in the metrology and tilt-measurement legs of the microscope are replaced by two permanently positioned independent imaging systems. Such optical decoupling of the two types of measurement eliminates the need for switching lens systems, which enables shorter measurement cycles, reduces mechanical vibrations, and simplifies hardware control mechanisms.
|
