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发明名称
摘要
申请公布号
JP3584066(B2)
申请公布日期
2004.11.04
申请号
JP19940244260
申请日期
1994.10.07
申请人
发明人
分类号
G01B11/00;G01N21/88;G01N21/94;G01N21/95;G01N21/956;H01L21/66;(IPC1-7):G01B11/00
主分类号
G01B11/00
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