| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor for improving an S/N ratio. <P>SOLUTION: The angular velocity sensor comprises a first movable section that is formed on a substrate and is made of a pair of semiconductor thin films arranged on a plane nearly in parallel with a substrate surface; at least a pair of second movable parts formed on the same plane as the first movable part; a first beam whose one end is fixed to the substrate and the other end is connected to the first movable part; a second beam that can be displaced in the first axis (x-axis) direction of the plane while both the ends are connected to the pair of second movable parts; and a third beam whose one end is connected to the first movable part and the other end is connected to the second movable part. Then, the first and second movable parts can be displaced to the first axis and the second axis (y axis) orthogonally crossing the first axis, the first movable part has a means for detecting displacement in the first and second axes, and the second movable part is composed to apply force in the direction of the first axis. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
