| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device preventing solidification of washing liquid in pipes during stoppage of operation with simple constitution, suited to cost reduction. SOLUTION: This washing device washes substrates by circulating the washing liquid through pipes p9, p4 and p1. The device is provided with a draining pipe having a drain valve at the lowest part of the piping route. The piping route is tilted toward the draining pipe so that the washing liquid in the pipes naturally drains out of the draining pipe via the drain valve by gravity when stopping operation. Lower parts of inner faces of the pipes at branching parts c1, c2 in the piping route are set to be lowered toward the draining pipe. COPYRIGHT: (C)2005,JPO&NCIPI
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