Growth of carbon nanotubes from silicon substrate coated with thin bilayer of titanium and cobalt deposited by chemical vapor deposition comprises use of hot filament on silicon substrate pre-coated with bilayer

摘要

The growth of carbon nanotubes on a substrate comprises chemical vapor deposition with a hot filament on a silicon (Si) substrate precoated with a bilayer of titanium (Ti) and cobalt (Co) such that the thickness of the titanium layer is 0.5-5 nm, the thickness of the cobalt layer is 0.25-10 nm and the thickness of the cobalt layer is between half and double the thickness of the titanium layer. An independent claim is also included for the coated substrate from which the nanotubes are obtained.