发明名称 Lithographic apparatus and motor for use in the apparatus
摘要 A Lorentz actuator provides a force between a first part and a second part of the apparatus, comprising a main magnet system, attached to a first part of the apparatus and providing a first magnetic field; a subsidiary magnet system, attached to the first part and arranged in a Halbach configuration, providing a second magnetic field; and an electrically conductive element attached to a second part of the apparatus and arranged so as to produce a force between the first and second parts of the apparatus by interaction of an electric current carried by the electrically conductive element and the combination of the first and second magnetic fields.
申请公布号 US2004207269(A1) 申请公布日期 2004.10.21
申请号 US20030740576 申请日期 2003.12.22
申请人 ASML NETHERLANDS BV 发明人 JOHAN HOL SVEN ANTOIN;EIJK JAN VAN;DE KLERK ANGELO CESAR PETER;VAN DER SCHOOT HARMEN KLASS
分类号 G03F9/00;G03F7/20;H01L21/027;H02K41/03;H02K41/035;(IPC1-7):H02K41/00 主分类号 G03F9/00
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