Complementary division condition determining method and program and complementary division method

摘要

A complementary division condition determining method and program and a complementary division method able to propose the optimum complementary division conditions for suppressing pattern displacement and mask destruction, wherein an internal stress of a mask is determined based on a displacement of a peripheral mark in a case when forming an opening in the mask and this value is used for first analysis (step ST12), pattern displacement and stress concentration occurring due to openings of split patterns are analyzed based on a first analysis model in a first analysis (step ST13), and a displacement due to external force of the membrane between the split patterns is analyzed in a second analysis (step ST14). The order of the first and second analyses is not important. In this way, the results of the first analysis performed from the viewpoint of the influence of an opening of a pattern and the second analysis performed from the viewpoint of the strength of the membrane between the patterns are used together and the complementary division conditions are determined based on the allowable displacement and stress concentration (step ST15).