MULTIFUNCTIONAL SUBSTITUTED MONOMERS AND POLYARYLENE COMPOSITIONS THEREFROM
摘要
<p>A compound useful in the formation of polymeric dielectric films for semiconductor devices and the resulting cured films and devices, said compound comprising i) three or more dienophile groups (A-functional groups) and ii) a single ring structure comprising two conjugated carbon-to-carbon double bonds and a leaving group L (collectively referred to as a B-functional group), characterized in that one A-functional group of one molecule of the compound is capable of reaction under cycloaddition reaction conditions with the B-functional group of a second molecule and elimination of the leaving group L, to thereby form a polymer.</p>
申请公布号
WO2004090018(A1)
申请公布日期
2004.10.21
申请号
WO2004US09972
申请日期
2004.04.01
申请人
DOW GLOBAL TECHNOLOGIES INC.;HAHNFELD, JERRY, L.;HEFNER, ROBERT, E., JR.;LI, YONGFU;NIU, Q., JASON
发明人
HAHNFELD, JERRY, L.;HEFNER, ROBERT, E., JR.;LI, YONGFU;NIU, Q., JASON