HIGH DURABILITY QUARTZ GLASS, ITS MANUFACTURING METHOD, AND MEMBER AND DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a quartz glass having a high purity and exhibiting enhanced durability while keeping good processability and machinability, and reduced dusting property as a member of a semiconductor production apparatus or a liquid crystal display production apparatus using a halide gas and/or its plasma; and to provide a device equipped with such excellent quartz glass. SOLUTION: The highly durable quartz glass is characterized by containing aluminum and at least one element (M) selected from the group consisting of group 2A elements, group 3A elements and group 4A elements of the periodic table. A method for manufacturing the quartz glass, and the quartz glass member and the device using the quartz glass are also provided. COPYRIGHT: (C)2005,JPO&NCIPI