| 摘要 |
PROBLEM TO BE SOLVED: To provide a die head for discharging a coating liquid capable of forming a uniform coated film which has no unevenness on a substrate even if a foreign substance is present on the substrate when performing a coating by using a die head. SOLUTION: A discharge port 21 is disposed on the lower surface 3a of the die head 3. A bumper part 34 having the same height as that of the discharge port 21 is formed on the side in the advancing direction of the die head 3 rather than the discharge part 21 by making the lower surface 3a of the die head 3 a horizontal plane. When the die head 3 discharging the coating liquid is moved on the surface of the substrate G, the foreign substance P such as a protrusion on the substrate G necessarily comes into collision with the bumper part 34. As a result, it is prevented that the foreign substance P comes into collision with the discharge port 21 by means of the bumper part 34, therefore, the state of the coating liquid discharged from the discharge port 21 is stabilized and the coated film without the unevenness is formed on the substrate G. COPYRIGHT: (C)2005,JPO&NCIPI
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