Application of anti-stick coating, preferably to micromechanical structure, e.g. sensor or actuator for gyroscope or acceleration sensor, uses silanes with reactive and inert groups, preferably in chemical vapor deposition, and hydrolysis

摘要

Application of an anti-stick coating by treating a surface with a silane is carried out with compound(s) selected from silanes with reactive and inert substituents and specified range of silanes, silylated perfluoro-polyethers and amines, silazanes and siloxanes. Application of an anti-stick coating by treating a surface with a silane is carried out with a silane (mixture) selected from silanes of formulae (1a-1d), (1e-1g), (1h) and (1i) with specified combinations of substituents or from compound(s) selected from 13- and 11-(trichlorosilylmethyl)-heptacosane, hexadecyl- and isopropyl-trichlorosilane, methyl-triethoxy- and triacetoxy-silane, 3,3,3-trifluoropropyl-tri(m)ethoxy-, -triacetoxy- and -trichloro-silane; dimethyldichlorosilane; di(3,3,3-trifluoropropyl)-dichloro-, -dimethoxy- and -diethoxy-silane; tri(3,3,3-trifluoropropyl)chlorosilane; silylated perfluoro-polyethers; silylated amines; silazanes containing phenyl groups; 1,3-divinyltetramethyldisilazane; 1,1,3,3,5,5-hexamethylcyclotrisilazane; hexamethyldisiloxane; trimethylpentaphenyltrisiloxane DC 705; N,O-bis(trimethylsilyl)-acetamide, -trifluoroacetamide and -carbamate; and N-methyl-N-trimethylsilyltrifluoroacetamide. R1-SiX3 (1a-1d) R1R2-SiX2 (1e-1g) R1R2R3-SiX (1h) (Ra-Rb)n-SiX(4-n) (1i) X : (a) F, Br or alkoxy with over 2 C, (b) Cl or alkoxy, (c, e) F, Br, alkoxy or acetoxy, (d, f) Cl, (g) F, Br, alkoxy with over 2 C or acetoxy, (h) F, Br, I, alkoxy or acetoxy, (i) Cl, Br, alkoxy, methyl or acetoxy; R1(a) hydrocarbyl, (b) unhalogenated alkyl with functional group(s), (c, e) unfluorinated alkyl with over 2 C, allyl or a group containing aromatic group(s), (d, f) a group containing aromatic group(s) or chloroalkyl, (g) not fluoroalkyl, methyl or phenyl; R2alkyl or allyl, R1, R2, R3(h) not H or fluoroalkyl; Raperfluoroalkyl; Rban unhalogenated alkylene bridge, e.g. -CH2-, -CH2-CH2- or -(CH2)3-; and n : 0-2. An independent claim is also included for devices with a surface coated by this process.