MANUFACTURING APPARATUS FOR TREATMENT LIQUID, MANUFACTURING METHOD AND TREATMENT APPARATUS FOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing device with a simple constitution capable of accurately mixing a plurality of kinds of liquids to make a treatment liquid. SOLUTION: The manufacturing device for the treatment liquid is provided with a plurality of feed parts 4-6 for feeding the respective liquids; a plurality of feed conduits 1-3 having one end connected to the respective feed parts; a pressure reducing valves 11, 24, 34 provided on a midway part of the respective feed conduits and reducing a pressure of the liquid fed from the respective feed parts to the respective feed conduits to a predetermined pressure; orifices 12, 25, 35 provided at a downstream side of the respective pressure reducing valves and giving a load to the respective liquids having the pressure reduced to a predetermined pressure by the respective pressure reducing valves; a mixing tank 14 connected with the other ends of the respective feed conduits through which the respective liquids controlled to a predetermined flow rate by the pressure reducing valves and the orifices are made ot flow and mixed. COPYRIGHT: (C)2005,JPO&NCIPI