ANISOTROPIC CONDUCTIVE CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTION DEVICE AND WAFER INSPECTION METHOD

摘要

An anisotropic conductive connector is disclosed which can maintain good conductive properties for a long time in a case where the connector is repeatedly used many times in electrical inspections of integrated circuits formed on a wafer. The anisotropic conductive connector has a high durability and a long life. Applications of such an anisotropic conductive connector are also disclosed. The anisotropic conductive connector comprising an elastic anisotropic conductive film that is provided with a plurality of conductive parts for connection which contain conductive particles and extend in the thickness direction is characterized in that each conductive particle contained in the conductive parts for connection is formed by covering the surface of a magnetic core particle with a coating layer composed of a highly conductive metal, and in that the coating layer has a high hardness.