SUBSTRATE STICKING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate sticking device for sticking substrates wherein the substrates are held at an electrostatic chuck so as not to be distorted. SOLUTION: The substrate sticking device is provided with a vacuum chamber 22, a first electrostatic chuck 28 disposed in the vacuum chamber and having vacuum suction holes for holding a first substrate, a second electrostatic chuck 34 disposed opposite to the first electrostatic chuck in the vacuum chamber and having vacuum suction holes for holding a second substrate and a sucker 42 provided at at least one of the first and the second electrostatic chucks and capable of sucking the center part of the related substrate. COPYRIGHT: (C)2005,JPO&NCIPI