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摘要
申请公布号
JP2004530159(A)
申请公布日期
2004.09.30
申请号
JP20020589881
申请日期
2002.04.25
申请人
发明人
分类号
C08F220/42;C08F232/00;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):G03F7/039
主分类号
C08F220/42
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代理人
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