发明名称 |
Contact temperature probe and process |
摘要 |
A contact measurement probe for measuring a temperature of a substrate in a process environment includes a probe head having a contact surface made of a ceramic material or a polymeric material for contacting the substrate. The contact measurement probe eliminates electrical biasing effects in process environments that include an ion source, thereby providing greater accuracy and reproducibility in temperature measurement.
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申请公布号 |
US6796711(B2) |
申请公布日期 |
2004.09.28 |
申请号 |
US20020113554 |
申请日期 |
2002.03.29 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
COLSON MICHAEL BRUCE;SRIVASTAVA ASEEM KUMAR |
分类号 |
G01K1/12;G01K1/14;G01K1/18;(IPC1-7):G01K7/06;H01L35/08;H01L35/32 |
主分类号 |
G01K1/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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