发明名称 Dispensing apparatus
摘要 Described are dispensing apparatuses and methods of their use, the dispensing apparatuses having one or more process chamber inside of a control chamber, and the volume of the process chamber increases or decreases by adding or removing control fluid from the control chamber, with proper valving, to cause fluid to flow into and out of the process chamber, for use in dispensing fluid, especially in precise amounts.
申请公布号 US6797063(B2) 申请公布日期 2004.09.28
申请号 US20020255370 申请日期 2002.09.26
申请人 FSI INTERNATIONAL, INC. 发明人 MEKIAS KADER
分类号 F04B43/12;B05C11/08;B05C11/10;B67D7/02;F04B43/10;H01L21/027;(IPC1-7):B05C11/00;F04B43/00 主分类号 F04B43/12
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