MASS MEASURING CHIP, MASS MEASURING INSTRUMENT AND METHOD FOR MANUFACTURING THE CHIP

摘要

PROBLEM TO BE SOLVED: To provide a mass measuring chip enhanced in sensitivity, made small-sized and constituted so as to have a multi-sensor structure. SOLUTION: The mass measuring chip has a flat plate 10 having a through-hole 12 and a piezoelectric vibration piece 20 arranged on the under surface side of the flat plate 10. The piezoelectric vibration piece 20 is joined to the flat plate 10 so that the through-hole 12 is hermetically sealed while exposing the exciting electrode 22a of the piezoelectric vibration piece 20 toward the upper surface of the flat plate 10 through the through-hole 12 and the IC 40 constituting an oscillation circuit is joined to the under surface of the flat plate 10 to electrically connect the piezoelectric vibration piece 20 and the IC 40. COPYRIGHT: (C)2004,JPO&NCIPI