发明名称 |
Functional device, method of manufacturing therefor and driver circuit |
摘要 |
A driver circuit substrate is prepared and a mirror substrate is so provided as to be placed on the driver circuit substrate. Nine mirror elements are lad out on the mirror substrate in a 3x3 matrix form. The mirror elements are prepared by a microelectromechanical system (MEMS). An insulating substrate is provided on the driver circuit substrate and a driver circuit which drives a light reflecting mirror element is provided on the insulating substrate. The driver circuit substrate is connected to the mirror substrate via a resin layer of a thermosetting adhesive or the like.
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申请公布号 |
US6787384(B2) |
申请公布日期 |
2004.09.07 |
申请号 |
US20030653810 |
申请日期 |
2003.09.03 |
申请人 |
NEC CORPORATION |
发明人 |
OKUMURA TOSHIYUKI |
分类号 |
B81C1/00;B81C3/00;G02B6/12;G02B6/34;G02B6/35;(IPC1-7):H01L21/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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