| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping apparatus reusing a used lapping film without discarding it. SOLUTION: This lapping apparatus includes: a lapping film 1 having abrasive grains on the whole surface of a non-expandable and deformable thin base material, the abrasive grain surface of which is pressed to a work by a shoe to machine the work W surface; a supply reel 5 where the lapping film 1 is wound to be freely delivered; a take-up reel 6 taking up the delivered lapping film 1; and a control part C for controlling the drive of the supply reel 5 and the take-up reel 6. The control part C delivers the lapping film 1 wound around the take-up reel 6 from the take-up reel 6 and rewinds the same around the supply reel 5. COPYRIGHT: (C)2004,JPO&NCIPI |
