| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microscope with a stand that can compensate (equilibrating, decay compensation) for vibrations not only in the X and Y axes but also in the Z axis, i.e. three-dimensionally. <P>SOLUTION: The microscope and/or the stand have/has at least one supporting member and vibration compensation device, in which at least one ARES component (71) is arranged for vibration compensation inside or on the surface of one of the supporting members (2 or 7) or in place of one of the supporting members (2 or 7). <P>COPYRIGHT: (C)2004,JPO&NCIPI |
