发明名称 |
ELECTROOPTIC INSTRUMENT |
摘要 |
<p>A needle-shaped terminal, i.e., a probe tip, is brought into extremely close proximity with an object being measured. This probe tip is formed from an optically active material and in itself is electrically non-conductive, so that it has no electrical influence whatsoever on the object being measured. When optical pulses are beamed onto this probe tip, the probe tip becomes an electric conductor and a current flows between it and the object being measured, so that the electric potential of said object can be measured. <??>This facilitates previously impossible measurements of high-speed electric waveforms. It also facilitates high spatial resolution monitoring and control of probe tip position and characterisation of measurement sites, and enables highly reliable measurements to be made inexpensively. <IMAGE></p> |
申请公布号 |
EP0650067(B1) |
申请公布日期 |
2004.09.01 |
申请号 |
EP19940912091 |
申请日期 |
1994.04.12 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
TAKEUCHI, KOICHIRO;KASAHARA, YUKIO;MIURA, AKIRA;IWAOKA, HIDETO;SUGIYAMA, TADASHI |
分类号 |
G01Q30/02;G01Q60/24;G01R1/06;G01R1/067;G01R1/07;G01R19/00;G01R31/28;G01R31/302;G01R31/316;(IPC1-7):G01R19/00;H01L21/66 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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