| 摘要 |
PROBLEM TO BE SOLVED: To easily correct a four corner error by the four corner error correction part. SOLUTION: A load part 3 is connected with a base body 2 via a parallel link 4a and 4b, therebetween flexures 5a-5d are connected, wherein a deformation part 2a allowed with a minute deformation is formed at the upper part of the base body 2, and connected with the flexure 5a. At both the sides of the base body 2, the four corner error correction parts 10 are provided, wherein between a base part 12 and a 1st lever 13 are connected with a fulcrum 15, and between the 1st lever 13 and a 2nd lever 14 are connected with a flexible part 16. When the distance between the base part 12 and the 1st lever 13 is elongated by turning an adjusting bolt 11, the deformation is transferred to the tip 14a of the 2nd lever 14, then the end part 14b fixed between the deformation part 2a and the flexure 5a is applied with a deflection force, therefore the four corner error is corrected by deforming the height of the flexure 5a. COPYRIGHT: (C)2004,JPO&NCIPI
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