发明名称 |
Method of manufacturing a fixed abrasive material |
摘要 |
Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m<3 >to 1200 kg/m<3>.
|
申请公布号 |
US2004166790(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
US20030369628 |
申请日期 |
2003.02.21 |
申请人 |
BALIJEPALLI SUDHAKAR;ALDRICH DALE J.;GRIER LAURA A. |
发明人 |
BALIJEPALLI SUDHAKAR;ALDRICH DALE J.;GRIER LAURA A. |
分类号 |
B24D3/32;B24D13/14;B24D18/00;(IPC1-7):B24D11/00;B23F21/03;B23F21/23;B24B5/00;B24B7/00;B24B7/16;B24B33/00 |
主分类号 |
B24D3/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|