发明名称 SHAPE FORMING METHOD FOR NONPHOTOIMAGE PROCESSABLE MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a forming method of a shape in a nonphotoimage processable material coated on a substrate. SOLUTION: A first resist is coated on at least a portion of a substrate that underlies a shape in a nonphotoimage processable material that is coated on the substrate. Thereafter, the nonphotoimage processable material is coated so that it overlaps at least a portion of the first resist. A second resist is then deposited on at least a portion of the nonphotoimage processable material, and the shape is patterned on the second resist. Subsequently, the part is sandblasted until the first resist is exposed, and the first and second resists are then removed. In one embodiment, the nonphotoimage processable material is deposited on a channel plate and used to seal at least a switching fluid between the channel plate and the substrate. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004240423(A) 申请公布日期 2004.08.26
申请号 JP20040021977 申请日期 2004.01.29
申请人 AGILENT TECHNOL INC 发明人 WONG MARVIN GLENN;KONDO TAKESHI;LINDSEY JOHN RALPH
分类号 G03F7/40;G03F7/26;H01H11/02;H01H29/02;H01H29/28;H01H29/30;(IPC1-7):G03F7/40 主分类号 G03F7/40
代理机构 代理人
主权项
地址