| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized solenoid valve in which fluctuations of the internal volume of a valve chamber can be suppressed, and at the same time, the internal volume can be reduced. SOLUTION: The small-sized solenoid valve 1 is constituted as follows. A valve body 30, in which the valve chamber 8 communicating with first-third ports 5a-5c is internally provided, holds an oscillating member 10 so as to be capable of oscillating. The oscillating member 10 is oscillated by a driving means. Accordingly, a diaphragm 7 fixed to the oscillating member 10 is brought into contact with or separated from valve seats 6b, 6a formed in the valve chamber 8. A communicating state of the first-third ports 5a-5c can be switched. A part corresponding to the valve seats 6a, 6b of the diaphragm 7 is formed in a thicker wall on the non-contact liquid face side. The contact liquid face of the diaphragm 7 is formed flat. COPYRIGHT: (C)2004,JPO&NCIPI
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