发明名称 WIRING, SINGLE ELECTRON TRANSISTOR, AND CAPACITOR USING CARBON NANOTUBE
摘要 PROBLEM TO BE SOLVED: To provide a nano-device which shows excellent performances and is superior in productivity. SOLUTION: A source electrode 204, a drain electrode 206, and a gate electrode 208 are provided on a silicon substrate 202, and a carbon nanotube structure 131 is fixed so as to straddle over the source electrode 204 and the drain electrode 206. The carbon nanotube structure 131 is constituted by winding a polymer 119 on a surface of a carbon nanotube 105. The polymer 119 functions as a tunnel layer, and among the carbon nanotube 105, a portion positioned between the source electrode 204 and the drain electrode 206 functions as a Coulomb island. That is, electrons flow into the carbon nanotube 105 from the source electrode 204 through the polymer 119 and the electron flows out of the carbon nanotube 105 to the drain electrode 206 via the polymer 119. The number of the electron, existing in the carbon nanotube 105, is controlled according to a voltage applied to the gate electrode 208, and the size of the drain current is controlled. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004235618(A) 申请公布日期 2004.08.19
申请号 JP20030428385 申请日期 2003.12.24
申请人 SANYO ELECTRIC CO LTD 发明人 SUGIYAMA YUKIHIRO
分类号 B82B1/00;C01B31/02;H01G4/008;H01L21/3205;H01L23/52;H01L29/06;H01L29/66;(IPC1-7):H01L29/66;H01L21/320 主分类号 B82B1/00
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