| 摘要 |
PROBLEM TO BE SOLVED: To provide a new chamber for vacuum, resolving conventional problems like outgassing by applying special coating to an inner surface of the chamber for vacuum. SOLUTION: This chamber for vacuum is composed by forming a coating layer of a silica ceramic film made by applying and heating a polysilazane organic solvent solution to whole the inner wall of the chamber made of a metallic material. COPYRIGHT: (C)2004,JPO&NCIPI
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