| 摘要 |
PROBLEM TO BE SOLVED: To suppress the lowering of a throughput due to the exchange of an original edition. SOLUTION: An exposure device has a mask stage 9, a pre-alignment device 7 pre-aligning a mask 1, to be covered on the stage 9 and a mask-manipulating mechanism 10 for carrying the original edition between the stage 9 and the pre-alignment device 7 or exchanging the two original editions. An original-edition conveyor 30 has a mask transfer mechanism 8 for holding and transferring the mask 1 by holding sections 8a and 8b to hold the two masks 1 and a controller 11 for controlling the mechanism 8. The controller 11 controls the mechanism 8 so that the device 1 is provided with the second mask 1 in the order, and a third mask 1 in the order is held to the holding section 8a or 8b, when the first mask 1 which should be used for exposure is loaded on the stage 9. COPYRIGHT: (C)2004,JPO&NCIPI
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