SUPPORT PIN OF SPIN RINSE DRY CHUCK

摘要

PURPOSE: A support pin of a spin rinse dry chuck is provided to prevent abrasion due to collision between a support pin and a notch part or a flat zone formation part of a wafer by fixing the wafer to the support pin. CONSTITUTION: A body(110) is fixed to an upper side of a support arm. A loading region(111) is formed on an upper part of the body. A support part(112) is formed on one side of the body. A slide groove(113) is formed on the other side of the body. A sliding block(120) is installed in the inside of the body. A projection(122) is formed on one side of the sliding block. An elastic member(130) is used for providing the elastic force to the other side of the sliding block. A pressing member(140) includes a cam(141), a weight(142), and a lower guide shaft(143) in order to press the projection of the sliding block and support a lateral part of the wafer. The cam is installed in the inside of the main body. The lower guide shaft is installed at a lower side of the cam. The weight is coupled to the lower guide shaft.